Skip to Main Content
  • Linde Worldwide
  • Linde.com
  • About Linde
  • Linde, Making our world more productive Linde, Making our world more productive
  • Industrial Gases

  • Home
  • What‘s happening
      • Advanced Materials
      • Efficiency Gains
      • Quality of Life
      • Environment and Resources
      • Digitalization
  • Industries
      • Aquaculture
        • Flow-Through Farms
        • RAS
        • Sea Cages
        • Fish Transportation
      • Chemicals
        • Fine & Specialty Chemicals
        • Base & Petrochemicals
      • Construction & Infrastructure
        • Concrete
        • Construction
        • Heating, Ventilation & Air Conditioning (HVAC)
        • Heavy Machinery
        • Offshore
        • Pipelines
        • Wind, Wave & Tidal
        • Energy & Process Plants
        • Connecting your welding processes, simply, quickly and traceably
        • Ground freezing
      • Electronics
        • Semiconductor
        • Display
        • Solar
        • LED
        • Contact the Linde Team
        • Quality
        • News & Media
      • Food & Beverages
        • Beverages
        • Dairy
        • Dry Foods & Bakery
        • Fruit & Vegetables
        • Meat
        • Edible Oils & Fats
        • Prepared & Catered Foods
        • Fish & Seafood
      • Healthcare
        • Clinical Diagnostics
        • Hospital and Clinical Care
        • Homecare
        • Magnetic Resonance Imaging
      • Glass
        • Glass Melting
        • Glass Forming
        • Glass Surface Treatment
        • Window Insulation and Lighting
        • Gas supply
        • Service
      • Laboratories
      • Leisure & Hospitality
        • Hospitality
        • Home & Hobby
      • Metal Fabrication
        • Handcrafts & locksmiths
        • White goods
        • Scrap dealers
        • Metal job shops
        • EN 1090 Compliance
      • Metals
        • Aluminum
        • Iron
        • Steel
        • Gas supply
        • Services
      • Oil and Gas
        • Hydrocarbon recovery solutions
        • Plant and Pipeline Services
        • Cryo-condensation for VOC abatement
        • Water and wastewater treatment
      • Pharma & Biotech
        • Freeze drying
        • Reactor cooling
        • VOC emission control
        • Inert charging
        • Inerting, purging, sparging, pressure transfer
        • Gas Supply
        • Service
      • Plastics & Rubber
        • Linde Plastics Park
      • Power & Energy
        • Conventional power
        • Biomass fire suppression
      • Pulp & Paper
        • Pulp and paper mill interactive plan
      • Refining
        • Linde refining production plant
      • Transport
        • Aerospace
        • Automotive
        • Rail
        • Shipbuilding
        • Trucking
      • Waste Incineration
      • Water and Wastewater Treatment
        • Aerobic wastewater treatment with oxygen. Flexible and efficient aeration technologies.
        • Neutralisation and remineralisation with carbon dioxide
        • Pure oxygen for efficient ozone generation
        • Services and customer support
  • Solutions
      • Additive Manufacturing Processes
        • Metal Powder Production and Handling
        • 3D Printing
        • AM Gas Supply
        • Post-Production Processes
        • R&D Additive Manufacturing
        • AM Events
      • Analysis & Instrumentation
        • Traceability
      • Aquaculture
      • Cleaning, Polishing & Grinding
        • Bleaching
        • Carbon Dioxide Pulp Wash
        • CRYOCLEAN Cleaning Solutions
        • Grinding
      • Clinical Analysis & Diagnostics
      • Coating & Surface Treatment
        • Coating
        • Ultraviolet & Electron Beam Curing
      • Controlled & Modified Atmospheres
        • Carbonation
        • Controlled Atmosphere Stunning (CAS)
        • Enhancing Greenhouse Growth
        • Liquid Nitrogen Dosing
        • Modified Atmosphere Packaging (MAP)
        • Oxygenation in Aquaculture
      • Cutting, Joining & Heating
        • Brazing and soldering
        • Cutting
        • Welding
        • Connected Welding
        • Flame Heat Treatment for Fabrication
        • LASERLINE Global Gas Solutions
      • Emissions Solutions
        • LOTOX
        • CIRRUS
      • Energy storage
        • Hydrogen Energy Storage
        • Thermal Energy Storage (TES)
      • Freezing & Cooling
        • Cooling for Metal Fabrication
        • Cooling of Core Hoses
        • Dross Cooling with Argon
        • Extrusion Cooling
        • Food Chilling & Freezing
        • Freeze drying
        • In-Transit Refrigeration
        • Rapid Cooling
        • Reactor Cooling
      • Fumigation & Pest Control
      • Heat Treatment
        • Annealing
        • Furnace Brazing
        • Carburising & Carbonitriding
        • Neutral Hardening
        • Nitriding & Nitrocarburising
        • Powder Metal Sintering
        • Sub-zero Treatment
        • Hot isostatic pressing
        • Gas supply
        • Service
      • Hydrogen Energy
        • H2 is Everywhere
        • One-Stop Shop H2
        • H2 Reference Projects
      • Inerting, purging, sparging
        • Inerting
        • Blanketing
        • Purging
        • Sparging
        • Pressure Transfer
        • Inert Charging with N2LOCK®
      • Leisure & Hospitality
      • Melting & Heating
        • Heating for Metal Fabrication
      • Oil and Gas
      • Petrochemical Processing & Refining
        • Fluid Catalytic Cracking
        • Gas/Liquid Reactions
        • Heterogeneous Oxidations
        • Hydrogen in Refining
        • Sulfur Recovery in Claus Plants
        • Industrial services for Refineries
        • Emissions abatement
      • Pharmaceutical Processing
      • Plastics & Rubber Processing
        • Foaming
        • Gas Injection Moulding (GIM)
        • Advanced Temperature Control of Injection Moulds
        • Pretreatment & Cleaning solutions
        • Plastics & Rubber Deflashing
        • Tyre Curing
      • Process Chemistry
        • Hydrogen Applications for Chemical Production
        • Hydrogenation of Oil & Fat
        • Reactor Cooling
        • Recovery of Volatile Organic Compounds
        • Stirring
      • Pulp & Paper
        • Pulp Solutions
        • Papermaking
        • Frequently asked questions for Pulp and Paper Mills
      • Water and Wastewater Treatment
  • Products & Services
      • Aquaculture Solutions and Services
        • SOLVOX® A
        • SOLVOX® B & CD
        • SOLVOX® C Pressure-Dissolving Cone
        • SOLVOX® DropIn
        • SOLVOX® OxyStream
        • SOLVOX® Stream
        • SOLVOX® F
        • Innovations
        • Salt and brackish water
        • Fresh water
        • Gas supply
      • Atmospheric Gases
        • Air
        • Argon
        • Carbon dioxide
        • Helium
        • Nitrogen
        • Oxygen
        • Gases & Applications eBook
      • Electronic Gases and Chemicals
        • Bulk Gases
        • Electronic Special Gases
        • Isotopes
        • Lithography Gases
        • On-Site Gas Generation
        • On-Site Services
        • Rare Gases
        • Gas Systems and Equipment
        • Wet Chemicals
      • Energized Solutions
      • Food Chilling
        • ACCU-CHILL® BI
        • ACCU-CHILL® SC
        • ACCU-CHILL® IC
        • Dri-Pack®
        • Dry Ice
        • FROSTCRUISE®
        • Pelletizer system
        • Linde snow horns
        • Transport Controlled Temperature
      • Food Freezing
        • The Linde CRYOLINE Family
        • CRYOLINE CF
        • CRYOLINE CS
        • CRYOLINE CW
        • CRYOLINE CWI
        • CRYOLINE MT
        • CRYOLINE PE
        • CRYOLINE SC
        • CRYOLINE SI
        • CRYOLINE TI
        • CRYOLINE XF
      • Food Grade Gases
      • Fuel Gases
        • Acetylene
        • Hydrogen
        • Propane
        • Propylene
      • Fumigants
        • Carbon Dioxide in Agriculture
        • VAPORMATE
        • FAQs
      • Gas Mixtures
        • LASERLINE Global Gas Solutions
      • Heat treatment
        • Automated Gas Burners
        • Manual Gas Burners
        • Gas Supply
      • Packaged Chemicals
        • Product Range
        • Material data
      • Pharmaceutical Solutions
      • Plant and pipeline services
      • Plastics & Rubber Solutions
        • PLASTINUM Foam Injection Moulding
        • PLASTINUM Gas Injection Moulding with N₂
        • PLASTINUM Gas Injection Moulding with CO₂
        • PLASTINUM Gas Injection Moulding with Inner Cooling
        • PLASTINUM Injection Moulding Inerting
        • PLASTINUM Spot Cooling with CO₂
        • PLASTINUM Dynamic Temperature Control with CO₂
        • PLASTINUM Extrusion Foaming with CO₂
        • PLASTINUM Polyurethane Foaming with CO₂
      • Pulp & Paper Equipment
      • Refining Solutions
        • OXYMIX injector
        • OXYMIX flowtrain
        • SURE burners
      • Refrigerants
        • CFCs
        • HCFCs
        • HFCs
        • HFOs
        • Natural Refrigerants
        • Reclaim, Recovery & Waste Management
        • Leak Detection Gases
        • Environment and Legislation
        • Contacts
      • Shielding Gases
        • Argon 4.6
        • VARIGON H2
        • VARIGON H5
        • VARIGON He30
        • VARIGON He50
        • VARIGON He70
        • VARIGON N2.5
        • CORGON 5S2
        • CORGON 10
        • CORGON 18
        • CORGON 25
        • CORGON 12S2
        • CRONIGON 2
        • CRONIGON 2He38
        • CRONIGON 2He55
        • CRONIGON He30C
        • FORMIER 5
        • FORMIER 10
      • Specialty Gases & Equipment
      • Welding and Safety Products
        • Gas Equipment
        • Welding Consumables
        • Arc Equipment and Accessories
        • Personal Protective Equipment
        • Trade Tools
        • Welding & Safety Brands
        • ARCLINE® PP: Aluminium welding innovation
        • ARCLINE PAW. Simply plasma welding.
      • Supply Modes
        • Cylinders
        • Drum Tanks
        • Bulk Supply
        • Onsite Solutions
        • Pipelines
        • Air Separation Plants
        • HyCO Plants
        • Continuity of Supply
        • Gas calculator
      • Health & Safety
        • Mitigating Asphyxiation Risks
        • Gas Hazards & Properties
        • Handling Dangerous Substances
        • Handling Gas Cylinders & Cylinder Care
        • Safety Data Sheets
        • Transporting Gas Cylinders
  • Company
      • Linde
      • Careers
      • News & Media
      • Online Shops
      • COVID-19 statement
  •  
  • Linde Worldwide
  • Linde.com
  • About Linde
  • Products & Services
  • Aquaculture Solutions and Services
  • Atmospheric Gases
  • Electronic Gases and Chemicals
    • Bulk Gases
    • Electronic Special Gases
    • Isotopes
    • Lithography Gases
    • On-Site Gas Generation
    • On-Site Services
    • Rare Gases
    • Gas Systems and Equipment
    • Wet Chemicals
  • Energized Solutions
  • Food Chilling
  • Food Freezing
  • Food Grade Gases
  • Fuel Gases
  • Fumigants
  • Gas Mixtures
  • Heat treatment
  • Packaged Chemicals
  • Pharmaceutical Solutions
  • Plant and pipeline services
  • Plastics & Rubber Solutions
  • Pulp & Paper Equipment
  • Refining Solutions
  • Refrigerants
  • Shielding Gases
  • Specialty Gases & Equipment
  • Welding and Safety Products
  • Supply Modes
  • Health & Safety
  • Products & Services
  • Electronic Gases and Chemicals
  • Electronic Special Gases
Close up showing blue caps and shoulders of rows of specialty gas cylinders at Alpha New Jersey. Newly labelled and netted cylinders, ready for delivery.

Electronic Special Gases

Operating a global network of production plants strategically located in core manufacturing hubs to bring you the full range of special gases supporting all electronics manufacturing processes

Offering over 100 specialty gases and mixtures, we are the first and global choice for electronic special gases. Our extensive process knowledge ensures that our electronic gases exceed your most stringent purity and consistency demands.

Our network of electronic special gas production plants worldwide are strategically located in key manufacturing markets. This gives you the benefit of timely deliveries and flexibility and security of supply.

Electronic special gases are shipped in a variety of container sizes to fit your individual application needs. These include cylinders, ton tanks, tube trailers, and ISO containers.


Deposition

Etch

Ammonia (NH3) Boron trichloride (BCl3)
Dichlorosilane (SiH2Cl2) Carbon dioxide (CO2)
Disilane (Si2H6) Carbon monoxide (CO)
Hexachlorodisilane (Si2Cl6) Chlorine (Cl2)
Monomethylsilane (MMS) Chlorine trifluoride (ClF3)
Nitric oxide (NO) Difluoromethane - Halocarbon 32 (CH2F2)
Nitrous oxide (N2O) *Fluorine (F2)
Oxygen (O2)
Fluorine Nitrogen mixture (20% F2/N2 mixture)
Silane (SiH4) Hexafluoro-1, 3-butadiene - Halocarbon 2316 (C4F6)
Trichlorosilane (SiHCl3) Hexafluoroethane - Halocarbon 116 (C2F6)
Trimethylsilane (3MS) Hydrogen bromide (HBr)
Tungsten hexafluoride (WF6) Hydrogen chloride (HCl)

Hydrogen fluoride (aHF)

Methyl fluoride - Fluoromethane - Halocarbon 41 (CH3F)

Nitrogen trifluoride (NF3)

Octofluorocyclobutane - Halocarbon 318 (C4F8)

Octofluorocyclopentene - Halocarbon 1418 (C5F8)

Octofluoropropane - Halocarbon 218 (C3F8)

Silicon tetrafluoride (SiF4)

Sulphur hexafluoride (SF6)

Tetrafluoromethane - Halocarbon 14 (CF4)

Trifluoromethane - Halocarbon 23 (CHF3)

Xenon difluoride (XeF2)

Doping

Others

Arsine (AsH3) Argon (Ar)
Boron-11 trifluoride (11BF3) Helium (He)
Diborane (B2H6) *Hydrogen (H2)
Diborane (11B2H6) Hydrogen sulphide (H2S)
Germane (GeH4) *Nitrogen (N2)
Phosphine (PH3)
Trimethyl-Boron (TMB)

* Can be supplied from on-site generator


Availability and specifications may vary by location. Please contact your local Linde Gas office.

Electronics Office Contact
  • Contact your local Linde sales office

    Contact us
Market segments
  • Semiconductor
  • Display
  • Solar
  • LED
Collateral
Download Ammonia Datasheet(PDF 802.0 KB) Download Ammonia: A Feedstock Providing the Platform for Electronics article(PDF 2.0 MB) Download Anhydrous Hydrogen Fluoride datasheet(PDF 639.0 KB) Download Arsine datasheet(PDF 716.0 KB) Download Boron Trichloride datasheet(PDF 736.0 KB) Linde Carbon dioxide datasheet(PDF 690.0 KB) Download Boron Trifluoride datasheet(PDF 350.0 KB) Linde Carbon monoxide datasheet Dec 2018(PDF 468.0 KB) Download Chlorine datasheet(PDF 673.0 KB) Download Dichlorosilane Datasheet(PDF 817.0 KB) Linde Difluoromethane datasheet(PDF 732.0 KB) Download Disilane datasheet(PDF 867.0 KB) Download Fluorine Datasheet(PDF 656.0 KB) Linde Fluoromethane datasheet(PDF 721.0 KB) Download - Germane (GeH4) datasheet(PDF 934.0 KB) Download Hexachlorodisilane Datasheet(PDF 868.0 KB) Download Hexafluoro-1, 3-Butadiene datasheet(PDF 889.0 KB) Download Hexafluoroethane datasheet(PDF 748.0 KB) Download Hydrogen Bromide datasheet(PDF 603.0 KB) Download Hydrogen Chloride Datasheet(PDF 738.0 KB) Linde Nitric oxide datasheet(PDF 625.0 KB) Download Nitrogen Trifluoride datasheet(PDF 747.0 KB) Download Nitrous Oxide datasheet(PDF 790.0 KB) Download Octafluorocyclobutane datasheet(PDF 769.0 KB) Download Octofluorocyclopentene datasheet(PDF 842.0 KB) Download Octafluoropropane datasheet(PDF 807.0 KB) Download Phosphine datasheet(PDF 710.0 KB) Download Silane datasheet(PDF 752.0 KB) Download Sulfur Hexafluoride datasheet(PDF 674.0 KB) Linde Tetrafluoromethane datasheet(PDF 683.0 KB) Download Trichlorosilane datasheet(PDF 849.0 KB) Linde Trifluoromethane datasheet(PDF 680.0 KB) Download Tungsten Hexafluoride datasheet(PDF 824.0 KB) Download Xenon Difluoride datasheet(PDF 716.0 KB) Carbon Dioxide in Semiconductor Manufacturing - Specialty Gas Report article(PDF 458.0 KB) Silicon Semiconductor China - Enabling Electronics Manufacturing Etching Relies on Electronic Special Gases - Simplified Chinese(PDF 719.0 KB) Silicon Semiconductor China - Enabling Electronics Manufacturing Etching Relies on Electronic Special Gases - English(PDF 697.0 KB) Helium in Electronics: Enabling Leading-Edge Semiconductor Manufacturing(PDF 3.0 MB) Hydrogen in Electronics: Growing Applications and Consumption - Silicon Semiconductor article(PDF 6.0 MB) Innovations in Materials Recovery - Silicon Semiconductor article(PDF 4.0 MB) Nitrous Oxide - Not a Laughing Matter in Electronics Manufacturing - Gasworld article(PDF 788.0 KB)
    • Facebook Social Media icon
    • Twitter Social Media icon
    • YouTube Social Media icon
    • LinkedIn Social Media icon
    • Xing_Social_Media_icon
    • Instagram_Social_Media_icon
    • Sitemap
    • Terms of use
    • Legal notice
    • Data protection
    • Cookie Policy
    • Cookie Settings
  • © Linde 2021