On-Site Generation of Electronics Gases

Low-cost, Reliable Generation of N2, H2 and Fluorine, Plus NH3
Regardless of your volume and purity needs, we have a wide selection of on-site gas generators supporting the full range of process needs in the global electronics industry
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Low Running Costs and Reliable Design

Our on-site gas generators are optimized to keep your total cost of ownership as low as possible. We look at all cost factors including capital outlay, power consumption and running costs. In addition, our on-site gas generators give you the benefit of uninterrupted operations. They are designed for continuous delivery, seven days a week, 24 hours a day.

Our experts will advise you on the best low-cost and reliable solution for:

  • Nitrogen generation
  • Hydrogen generation
  • Fluorine generation
  • Ammonia purification
On-Site Generator Capacities


 Output range  


Nitrogen    6,000 - 50,000 Nm3 per hour   <1 ppb 
 Hydrogen   50 - 1,000 Nm3 per hour   99.999% 
 Fluorine   80 - 3,200 liters per hour   99.9% 
 Ammonia   1,000 - 5,000 liters per minute   99.99999% 

Any questions?

One of our experts would be delighted to discuss your on-site needs, answer your questions and provide more detailed information
Contact us