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For over twenty years, the excimer laser industry has relied on our SPECTRA™ lithography gases. SPECTRA gases were used in the development of the earliest lasers for lithography and are now the most widely used excimer gases for DUV photolithography in the semiconductor industry.
Lasers in thousands of the world's wafer steppers and scanners use our state-of-the-art SPECTRA gases and gas mixtures.
Our customers include all of the major global laser, stepper and scanner manufacturers as well as many of the world's largest semiconductor manufacturers. They know they can rely on the highest quality laser gases coupled with in-depth knowledge of critical gas technologies.
Our customers also benefit from the development of new technologies and innovations driven by our Centers of Excellence such as the one for SPECTRA lithography gases in Alpha, New Jersey. Key areas of expertise include:
Full spectrum - We lead the market for the manufacture and purification of all raw materials necessary for photolithography
Cylinder expertise - We have special expertise, which is based on our proprietary technologies for the handling and treatment of cylinders containing both inert and halogen (F2) gases.
Mixing capabilities - We have pioneered highly specific mixing technologies to create multi-component mixtures that are completely homogeneous.
Analytical technologies - We have developed proprietary analytical technologies that surpass industry norms; all SPECTRA lithography cylinders are provided with a Certificate of Analysis.