Electronic Special Gases
Operating a global network of production plants strategically located in core manufacturing hubs to bring you the full range of special gases supporting all electronics manufacturing processes
Offering over 100 specialty gases and mixtures, we are the first and global choice for electronic special gases. Our extensive process knowledge ensures that our electronic gases exceed your most stringent purity and consistency demands.
Our network of ten electronic special gas production plants worldwide are strategically located in key manufacturing markets. This gives you the benefit of timely deliveries, flexibility and security of supply.
Electronic special gases, including silane, nitrogen trifluoride, ammonia and dopant mixtures are shipped in a variety of container sizes to fit your individual application needs. These include cylinders, tonne tanks, tube trailers and ISO containers.
Although requirements vary from one region to another, the following table shows the main electronic special gases we supply:
| Deposition | Etch | |
| Ammonia (NH3) | Boron trichloride (BCl3) | Halocarbon 116 (C2F6) |
| Dichlorosilane (SiH2Cl2) | Carbon monoxide (CO) | Halocarbon 218 (C3F8) |
| Disilane (Si2H6) | Carbon dioxide (CO2) | Halocarbon 2316 (C4F6) |
| Hexachlorodisilane (Si2Cl6) | Chlorine (Cl2) | Halocarbon 318 (C4F8) |
| Monomethylsilane (MMS) | Chlorine trifluoride (ClF3) | Hydrogen bromide (HBr) |
Nitric oxide (NO)
| *Fluorine (F2) | Hydrogen chloride (HCl) |
| Oxygen (O2) | Halocarbon 14 (CF4) | Hydrogen fluoride (HF) |
| Silane (SiH4)
Trisilane (Si3H8) | Halocarbon 1418 (C5F8) | Nitrogen trifluoride (NF3) |
| Trichlorosilane (SiHCl3) | Halocarbon 23 (CHF3) | Silicon tetrafluoride (SiF4) |
| Trimethylsilane (3MS) | Halocarbon 32 (CH2F2) | Sulphur hexafluoride (SF6) |
| Tungsten hexafluoride (WF6) | Halocarbon 41 (CH3F) | |
| Doping | Others | |
| Arsine (AsH3) | Argon (Ar) | |
| Boron-11 trifluoride (11BF3) | Helium (He) | |
| Diborane (B2H6) | *Hydrogen (H2) | |
| Diborane (B2H6) | *Nitrogen (N2) | |
| Germane (GeH4) | Hydrogen sulphide (H2S) | |
| Phosphine (PH3) | Hydrogen selenide (H2Se) | |
| Trimethyl-Boron (TMB) | Diethylzinc (DEZ) | |
| * Can be supplied from on-site generator | ||
Availability and specifications may vary by location. Please contact your local Linde Gas office.
