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For electronics manufacturers who require a continuous, safe and reliable source of ultra-pure hydrogen in high volumes, for example to support epitaxial silicon growth, thermal processing or MOCVD growth control, our HYDROPRIME™ series of on-site hydrogen generators is a cost-effective and low-emission solution.
This highly packaged, standardized series is based on steam methane reforming (SMR) technology. Production capacities vary from 50 to 1,000 Nm3 per hour with purities of 99.999%.
HYDROPRIME systems come as complete factory-assembled units on a single transportable skid. They can be installed and commissioned within fourteen days of arrival to the site. Innovative features and benefits include:
Stable and reliable operation due to state-of-the-art SMR technology
High thermal efficiency resulting in low product costs
Reduced carbon dioxide footprint compared with bulk supplies delivered in tankers
Fast installation and unattended operation from a remote operations center (ROC), automatic start-up and load-following features
On-site back-up storage coupled with data connection to Linde's remote operations centers for unsurpassed safety and reliability.