We deliver a wide range of value-added technologies to help you meet your specific cost and environmental challenges.
On-site fluorine generation
We pioneered the use of molecular fluorine (F2) to replace gases with a high global warming potential such as nitrogen trifluoride (NF3) and sulphur hexafluoride (SF6). These are currently used to clean chemical vapour deposition (CVD) chambers in the manufacture of flat panel displays. Our Generation-F® On-Site fluorine generators deliver the most effective cleaning gas available, reducing cleaning time by over 50%, reducing tool downtime and improving line throughput by up to 10%.
Nitrogen generation
Our SPECTRA-N™ nitrogen generators are the most cost-effective and reliable way of supplying ultra-pure nitrogen in the large quantities needed by TFT-LCD manufacturers. With gas impurity levels below 1ppb, the SPECTRA-N consumes less power than conventional generators and also provides excellent turndown capabilities to meet facility ramp-up requirements.
Full spectrum
We offer the full range of gas and chemical products to support all TFT-LCD flat panel manufacturing processes:
Materials for TFT-LCD manufacture
| Bulk Gases | Electronic special gases |
| Nitrogen | Silane |
| Hydrogen | Nitrogen trifluoride |
| Helium | Fluorine (on-site generation) |
| Oxygen | Sulphur hexafluoride |
| Argon | Ammonia |
| Carbon dioxide |
| Phosphine mixtures |
Exact requirements will vary depending on the process and manufacturing region.
Systems and service expertise
In addition, we offer a wide range of professional services to allow you to focus on your core business and keep operations up and running. These extend from turnkey design and installation services to end-to-end management of your gas systems and include:
Bulk gas storage and distribution systems
Bulk special gas systems (BSGS)
Gas cabinets and gas distribution manifolds
Total gas & chemical management.
